Ibikoresho byiza mumashini ya lithographie

Igishushanyo mbonera gifite intera nini ya porogaramu mu gice cya kabiri. Muri mashini ya fotolithographie, sisitemu ya optique ishinzwe kwibanda kumurabyo wumucyo utangwa nisoko yumucyo no kuwushyira kuri wafer wa silicon kugirango ugaragaze imiterere yumuzunguruko. Kubwibyo, gushushanya no gutezimbere ibice bya optique muri sisitemu ya Photolithography ninzira yingenzi yo kunoza imikorere yimashini ifotora. Ibikurikira nibimwe mubice bya optique bikoreshwa mumashini ya Photolithography:

Intego
01 Intego ya projection nikintu cyingenzi cya optique mumashini ya lithographie, mubisanzwe igizwe nurukurikirane rw'ibice birimo lens ya convex, lens conave, na prism.
02 Igikorwa cyayo ni ukugabanya imiterere yumuzingi kuri mask hanyuma ukayerekeza kuri wafer yashizwemo nabafotora.
03 Ukuri hamwe nimikorere yintego ya projection bigira uruhare rukomeye mubyemezo no kwerekana imiterere yimashini ya lithographie

Indorerwamo
01 Indorerwamozikoreshwa muguhindura icyerekezo cyumucyo no kukuyobora ahantu heza.
02 Muri mashini ya litiro ya EUV, indorerwamo ni ngombwa cyane kuko urumuri rwa EUV rwakirwa byoroshye nibikoresho, bityo indorerwamo zifite imbaraga nyinshi zigomba gukoreshwa.
03 Ubuso bwuzuye kandi butajegajega bugaragaza kandi bigira ingaruka zikomeye kumikorere yimashini ya lithographie.

Muyunguruzi
01 Akayunguruzo gakoreshwa mugukuraho uburebure bwumurambararo utifuzwa, kunoza neza nubwiza bwibikorwa bya fotolitografiya.
02 Muguhitamo akayunguruzo gakwiye, birashobora kwemezwa ko urumuri rwumurambararo rwonyine rwinjira mumashini ya lithographie, bityo bikazamura ukuri nukuri kwimikorere ya lithographie.

Prisms nibindi bice
Byongeye kandi, imashini ya lithographie irashobora kandi gukoresha ibindi bikoresho bifasha optique, nka prism, polarizeri, nibindi, kugirango byuzuze ibisabwa byandikwa. Guhitamo, gushushanya no gukora ibyo bikoresho bya optique bigomba gukurikiza byimazeyo ibipimo bya tekiniki bijyanye nibisabwa kugirango hamenyekane neza kandi neza imashini ya lithographie.

Muri make, ikoreshwa ryibikoresho bya optique mubijyanye nimashini za lithographie bigamije kunoza imikorere nubushobozi bwimikorere yimashini za lithographie, bityo bigashyigikira iterambere ryinganda zikora mikorobe. Hamwe niterambere rihoraho ryikoranabuhanga rya lithographie, gutezimbere no guhanga udushya twa optique nabyo bizatanga amahirwe menshi yo gukora chip-generation izakurikiraho.

Kubindi bisobanuro ninama zinzobere, sura urubuga rwacu kurihttps://www.jiujonoptics.com/kwiga byinshi kubicuruzwa byacu nibisubizo.