Ibigize Optique mumashini ya Lithography

Igishushanyo mbonera gifite urwego runini rwibisabwa mumurima wa semiconductor. Muri imashini ya fotolhography, sisitemu ya optique ishinzwe kwibanda kuri beam yoroheje yasohowe ninkomoko yoroheje hanyuma iyishyire kuri wafer wa silicon kugirango yerekane icyitegererezo cyumuzunguruko. Kubwibyo, igishushanyo mbonera no guhitamo ibice bya optique muri sisitemu yamafoto nuburyo bwingenzi bwo kunoza imikorere ya mashini ya Photolithography. Ibikurikira nibimwe mubigize optique bikoreshwa mumashini ya PhotolThography:

Intego ya Projection
01 Intego ya projection nigice cyingenzi cya optique mumashini ya Lithography, ubusanzwe igizwe nurwego rwinshi harimo lens, lens za convex, na prism.
02 Imikorere yayo ni ukugabanya icyitegererezo cyumuzunguruko kuri mask kandi umwimenye kuri wafer yashizwemo na afoto.
03 Ukuri no gukora neza intego ya projection bigira uruhare rukomeye kumugaragaro no gutekereza neza kumashini ya Lithography

Indorerwamo
01 Indorerwamobakoreshwa muguhindura icyerekezo cyumucyo no kuyayobora ahantu heza.
02 Mu mashini ya euv Lithography, indorerwamo zingenzi cyane kuko urumuri rwa euv rworoshye kubikoresho, bireba rero imyifatire yo hejuru igomba gukoreshwa.
03 Ubumenyi bw'ukuri no gutuza byerekana kandi ingaruka zikomeye kumikorere ya mashini ya Lithography.

Akayunguruzo
01 Akayunguruzo gakoreshwa kugirango ukureho uburebure bwumucyo udashaka, utezimbere ukuri nubwiza bwibikorwa byamafoto.
02 muguhitamo akayunguruzo, birashobora kwemerwa ko urumuri rwihariye rwinjira mumashini ya lathography, bityo bigatuma ukuri kandi biteza imbere ukuri kandi ituze muburyo bwa Lithography.

Prism nibindi bice
Byongeye kandi, imashini ya Lithography irashobora kandi gukoresha izindi ngingo zingirakamaro, nka Prisms, polarize, nibindi, kugirango wuzuze ibyangombwa byihariye. Guhitamo, gushushanya no gukora ibi bice byiza bigomba gukurikiza byimazeyo amahame n'ibisabwa kugirango habeho neza kandi neza imashini itagaragara.

Muri make, gushyira mubikorwa ibice bya optique mumurima imashini za Lithography zigamije kunoza imikorere n'imikorere yimashini za Lithography, bityo ishyigikira iterambere ryinganda zikoreshwa rya microelectronics. Hamwe no guteza imbere ikoranabuhanga rya Lithography, uburyo bwo guhitamo no guhanga udushya bwibigizenone nabyo bizatanga imbaraga nyinshi kugirango ukore chip igisekuru gikurikira.

Kubishishozi byinshi nubushobozi bwinzobere, sura urubuga rwacu kurihttps://www.jiujonozoptics.com/Kugira ngo umenye byinshi kubicuruzwa byacu nibisubizo.